Company

Certifications / Patents

Certifications / Patents

Leading ALD deposition competitiveness through securing intellectual property and development core technologies
  • A Total of 37 Patents Held (27 Domestic / 10 Overseas)
    • 14 Registered Patents Worldwide (12 Domestic / 2 Overseas)
    • 23 Patent Applications Pending (15 Domestic / 8 Overseas)
  • 5 Registered Trademarks (3 Domestic / 2 Overseas)

Quality Management System Certification

Material, Parts, Equipment Specialist Company Confirmation

Confirmation letter as venture company

Venture Company Certification

Certificate of Recognition for In-house Corporate Research Institute

Inno-Biz (Technology Innovation SME) Certification

Global IP Star Company Designation Certificate

Main-Biz (Management Innovation SME) Certification

제 10-1834200 호

제 10-2761054 호

Patent registration: 14 cases (12 domestic, 2 overseas)

As of December 22, 2025

No Category Right Country Applicant Filing Date Application No. Registration Date Registration No. Title
14 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2017-04-14 10-2017-0048384 2019-04-14 10-1972389 Gas Supply Module for Atomic Layer Deposition
13 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2016-06-24 10-2016-0079168 2018-02-06 10-1828478 Apparatus and Method for Organic-Inorganic Thin Film Deposition
12 Hybrid High-Speed ALD Patent KR NEXUSBE Co., Ltd. 2016-06-24 10-2016-0079170 2018-02-26 10-1834200 Gas Module of Apparatus for Atomic Layer Deposition, Atomic Layer Deposition Apparatus and Operation Method Thereof
11 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2016-06-24 10-2016-0079172 2018-04-10 10-1849388 Gas Module of Apparatus for Atomic Layer Deposition, Atomic Layer Deposition Apparatus and Operation Method Thereof
10 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2016-08-26 10-2016-0108987 2018-07-31 10-1885525 Atomic Layer Deposition Apparatus and Operation Method Thereof
9 mini ALD Patent KR NEXUSBE Co., Ltd. 2020-09-24 10-2020-0124118 2020-12-11 10-2192623 Thin-Film Deposition Equipment
8 PCR Patent KR NEXUSBE Co., Ltd. 2017-04-19 10-2017-0050591 2019-11-14 10-2046943 Portable Real-Time PCR Device
7 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2018-08-17 10-2018-0095961 2020-07-02 10-2131933 Atomic Layer Deposition Apparatus and Operation Method Thereof
6 R2R ALD Patent KR NEXUSBE Co., Ltd. 2016-01-13 10-2016-0004317 2017-09-28 10-1784669 Roll-to-roll-based Multilayer Stacking Method
5 R2R ALD Patent KR NEXUSBE Co., Ltd. 2021-10-14 10-2021-0136293 2024-12-20 10-2746990 Roll-to-roll ALD Apparatus
4 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2021-12-29 10-2021-0190716 2025-01-23 10-2761054 Atomic Layer Deposition Apparatus and Operation Method Thereof
3 Spatial ALD Patent KR NEXUSBE Co., Ltd. 2022-09-01 10-2022-0110596 2025-07-25 10-2840388 ALD Apparatus
2 Semiconductor ALD Patent CN NEXUSBE Co., Ltd. 2021-02-09 201880096524.1 2023-06-09 ZL201880096524.1 Atomic layer deposition apparatus and atomic layer deposition method using same
1 R2R ALD Patent CN NEXUSBE Co., Ltd. 2021-10-27 202111253324.2 2024-05-28 ZL202111253324.2 Roll-to-roll atomic layer deposition apparatus

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Patent Application: 23 cases (15 domestic, 8 overseas)

As of December 22, 2025

No Category Right Country Applicant Filing Date Application No. Publication Date Publication No. Title
23 2021-06-22 Patent KR NEXUSBE Co., Ltd. 2021-06-22 10-2021-0080871 2022-12-29 10-2022-0170164 Gas Supply and Pumping Equipment for Compact ALD System
22 2021-06-22 Patent KR NEXUSBE Co., Ltd. 2021-06-22 10-2021-0080870 2022-12-29 10-2022-0170163 Compact ALD System
21 2022-07-15 Patent PCT NEXUSBE Co., Ltd. 2022-07-15 PCT/KR2022/010333 2023-07-06 WO 2023/128097 Atomic layer deposition apparatus and atomic layer deposition method using same
20 2022-07-27 Patent US NEXUSBE Co., Ltd. 2022-07-27 US17875379 2022-11-17 US 2022/0364237 Roll-to-roll atomic layer deposition apparatus
19 2023-09-01 Patent PCT NEXUSBE Co., Ltd. 2023-09-01 PCT/KR2023/013053 2024-03-07 WO 2024/049264 ALD Apparatus
18 2023-04-21 Patent KR NEXUSBE Co., Ltd. 2023-04-21 10-2023-0052499 Spatial ALD Apparatus
17 2023-04-21 Patent KR NEXUSBE Co., Ltd. 2023-04-21 10-2023-0052500 Spatial ALD Apparatus
16 2022-12-09 Patent KR NEXUSBE Co., Ltd. 2022-12-09 10-2022-0171752 Spatial ALD Apparatus
15 2023-03-29 Patent KR NEXUSBE Co., Ltd. 2023-03-29 10-2023-0041296 Spatial ALD Apparatus
14 2023-03-29 Patent KR NEXUSBE Co., Ltd. 2023-03-29 10-2023-0041295 ALD Apparatus
13 2022-12-09 Patent KR NEXUSBE Co., Ltd. 2022-12-09 10-2022-0171753 Batch-type ALD System
12 2023-11-01 Patent KR NEXUSBE Co., Ltd. 2023-11-01 10-2023-0149422 Hybrid Deposition Apparatus for Gallium Oxide and Operation Method Thereof
11 2023-11-02 Patent PCT NEXUSBE Co., Ltd. 2023-11-02 PCT/KR2023/017367 Hybrid Deposition Apparatus for Gallium Oxide and Operation Method Thereof
10 2024-06-12 Patent KR NEXUSBE Co., Ltd. 2024-06-12 10-2024-0076005 Substrate with Gallium Oxide Layer and Manufacturing Method Thereof
9 2024-06-27 Patent US NEXUSBE Co., Ltd. 2024-06-27 US18755892 Atomic layer deposition apparatus and atomic layer deposition method using same
8 2024-08-30 Patent KR NEXUSBE Co., Ltd. 2024-08-30 10-2024-0117451 ALD Apparatus with Multi-Showerhead Structure for Multi-Component Thin Film Deposition
7 2024-11-21 Patent US NEXUSBE Co., Ltd. 2024-11-21 US18954841 Hybrid depositing apparatus for gallium oxide and method for hybrid depositing using same
6 2024-11-27 Patent KR NEXUSBE Co., Ltd. 2024-11-27 10-2024-0171862 Batch-type ALD Apparatus with Showerhead-type Gas Supply Module
5 2024-11-27 Patent KR NEXUSBE Co., Ltd. 2024-11-27 10-2024-0171868 Batch-type ALD Apparatus with Heating Module
4 2025-02-27 Patent CN NEXUSBE Co., Ltd. 2025-02-27 202380062510.9 HYBRID DEPOSITING APPARATUS FOR GALLIUM OXIDE AND METHOD FOR HYPRID DEPOSITING USING SAME
3 2025-02-27 Patent CN NEXUSBE Co., Ltd. 2025-02-27 202510222018.4 SUBSTRATE HAVING GALLIUM OXIDE LAYER AND MANUFACTURING METHOD FOR THE SAME
2 2025-11-19 Patent KR NEXUSBE Co., Ltd. 2025-11-19 10-2025-0176037 Multiple Showerhead Assembly for Deposition of Multicomponent Thin Films
1 2025-11-26 Patent KR NEXUSBE Co., Ltd. 2025-11-26 10-2025-0182265 Roll-to-roll ALD Apparatus

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Trademark Registration: 5 cases (3 domestic, 2 overseas)

As of December 22, 2025

No Category Right Country Applicant Filing Date Application No. Registration Date Registration No. Title
5 Trademark Registration Trademark KR NEXUSBE Co., Ltd. 2018-09-19 40-2018-0131402 2019-10-28 40-1536821 NEXUSBE
4 Trademark Registration Trademark KR NEXUSBE Co., Ltd. 2018-09-19 40-2018-0131403 2019-11-18 40-1544888 NEXUS
3 Trademark Registration Trademark KR NEXUSBE Co., Ltd. 2020-06-23 40-2020-0106467 2022-02-03 40-1827897 PLAMINAR
2 Trademark Registration Trademark CN NEXUSBE Co., Ltd. 2021-10-13 59803289 2022-05-28 59803289 NEXUSBE
1 Trademark Registration Trademark CN NEXUSBE Co., Ltd. 2021-10-13 59801987 2022-04-21 59807987 NEXUSBE

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